Title :
Direct measurement of base drift field in bipolar transistors
Author :
Yan, Ran-Hong ; Liu, Teyin M. ; Chiu, Tzu-Yin ; Archer, Vance D.
Author_Institution :
AT&T Bell Lab., Holmdel, NJ, USA
fDate :
5/1/1992 12:00:00 AM
Abstract :
The authors have developed a method to measure an effective base drift field and the base transit-time reduction factor of bipolar transistors, by measuring the excess phase of the base transport factor. This technique relies on measuring small-signal characteristics of the transistor at a low frequency and following the phase of the transconductance at the frequency approaching and exceeding the unit current gain frequency (f/sub T/). With this technique, the authors verify that the effective drift inside the base of Si bipolar transistors decreases with increased base implantation energy and thermal treatment. Such directly measured drift-dependent base transport provides additional insight for optimizing processing used in bipolar technology development.<>
Keywords :
bipolar transistors; doping profiles; semiconductor device models; Si; base drift field; base implantation energy; base transit-time reduction factor; bass transport factor excess phase; bipolar transistors; doping profiles; drift-dependent base transport; small-signal characteristics; thermal treatment; transconductance phase; unit current gain frequency; Bipolar transistors; Current measurement; Delay effects; Doping profiles; Frequency measurement; Phase measurement; Photonic band gap; Q measurement; Time measurement; Transconductance;
Journal_Title :
Electron Device Letters, IEEE