DocumentCode
921612
Title
n- and p-channel m.o.s.f.e.t.s as Rayleigh-surface-wave detectors
Author
Defranould, Ph.
Author_Institution
Thomson-CSF, ASM Division, Cagnes-sur-Mer, France
Volume
9
Issue
6
fYear
1973
Firstpage
125
Lastpage
126
Abstract
We have studied the piezoresistance effect in an m.o.s.f.e.t. structure used as a Rayleigh-surface-wave transducer. The investigation was carried out over a large frequency range about a central value of 100 MHz. Results for silicon¿m.o.s.f.e.t. n- and p- channel inversion layers are given.
Keywords
Rayleigh waves; acoustic surface wave devices; field effect transistors; MOSFET; Rayleigh surface wave detector; piezoresistance effect;
fLanguage
English
Journal_Title
Electronics Letters
Publisher
iet
ISSN
0013-5194
Type
jour
DOI
10.1049/el:19730092
Filename
4236031
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