DocumentCode
922742
Title
Collector-assisted operation of micromachined field-emitter triodes
Author
Busta, Heinz H. ; Pogemiller, Jay E. ; Zimmerman, Bruce J.
Author_Institution
Amoco Technol. Co., Naperville, IL, USA
Volume
40
Issue
8
fYear
1993
fDate
8/1/1993 12:00:00 AM
Firstpage
1537
Lastpage
1542
Abstract
The field at the tip of a field emitter triode can be expressed by E =βV g+γV c, where V g and V c the gate and collector voltages, respectively. For small gate diameters and tips below or in the plane of the gate and/or large tip-to-collector distances, γV c<<βV g. The-device is operated in the gate-induced field emission mode and the corresponding I -V c curves are pentode-like. By increasing the gate diameter and/or recessing the gates from the tips, collector-assisted operation can be achieved at reasonable collector voltages. Results are presented for two devices with gate diameters of 3.6 and 2.0 μm. By obtaining γ at different emitter-to-collector distances, I -V c and transconductance g m-V g curves are calculated and compared with experimental results. It is shown that as a consequence of collector-assisted operation, the transconductance of a device can be increased significantly
Keywords
electron field emission; triodes; vacuum microelectronics; 2.0 micron; 3.6 micron; collector voltages; collector-assisted operation; emitter-to-collector distances; gate diameters; gate-induced field emission mode; micromachined field-emitter triodes; tip-to-collector distances; transconductance; Chromium; Etching; Fabrication; Plasma temperature; Resists; Silicon; Testing; Transconductance; Tungsten; Voltage;
fLanguage
English
Journal_Title
Electron Devices, IEEE Transactions on
Publisher
ieee
ISSN
0018-9383
Type
jour
DOI
10.1109/16.223716
Filename
223716
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