• DocumentCode
    922742
  • Title

    Collector-assisted operation of micromachined field-emitter triodes

  • Author

    Busta, Heinz H. ; Pogemiller, Jay E. ; Zimmerman, Bruce J.

  • Author_Institution
    Amoco Technol. Co., Naperville, IL, USA
  • Volume
    40
  • Issue
    8
  • fYear
    1993
  • fDate
    8/1/1993 12:00:00 AM
  • Firstpage
    1537
  • Lastpage
    1542
  • Abstract
    The field at the tip of a field emitter triode can be expressed by EVg+γV c, where Vg and Vc the gate and collector voltages, respectively. For small gate diameters and tips below or in the plane of the gate and/or large tip-to-collector distances, γVc<<βV g. The-device is operated in the gate-induced field emission mode and the corresponding I-Vc curves are pentode-like. By increasing the gate diameter and/or recessing the gates from the tips, collector-assisted operation can be achieved at reasonable collector voltages. Results are presented for two devices with gate diameters of 3.6 and 2.0 μm. By obtaining γ at different emitter-to-collector distances, I-Vc and transconductance gm-Vg curves are calculated and compared with experimental results. It is shown that as a consequence of collector-assisted operation, the transconductance of a device can be increased significantly
  • Keywords
    electron field emission; triodes; vacuum microelectronics; 2.0 micron; 3.6 micron; collector voltages; collector-assisted operation; emitter-to-collector distances; gate diameters; gate-induced field emission mode; micromachined field-emitter triodes; tip-to-collector distances; transconductance; Chromium; Etching; Fabrication; Plasma temperature; Resists; Silicon; Testing; Transconductance; Tungsten; Voltage;
  • fLanguage
    English
  • Journal_Title
    Electron Devices, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0018-9383
  • Type

    jour

  • DOI
    10.1109/16.223716
  • Filename
    223716