Title :
Properties of irregular boundary of RF sputtered glass film for light guide
Author :
Suematsu, Yasuharu ; Furuya, Keiichi ; Chiba, Kazuya
fDate :
6/1/1972 12:00:00 AM
Abstract :
The correlation lengths and the average deviation of the irregular boundary of glass film prepared by the RF sputtering were estimated by comparing the measured directivity of the scattered light with the calculated one. Both of the longitudinal and the transverse correlation lengths were 0.2-1µm and the average amplitude was about 70 Å.
Keywords :
Dielectric losses; Glass; Light scattering; Optical films; Optical propagation; Optical scattering; Radio frequency; Refractive index; Slabs; Sputtering;
Journal_Title :
Proceedings of the IEEE
DOI :
10.1109/PROC.1972.8753
