Miniature temperature-insensitive Fabry-Pe/spl acute/rot fiber-optic pressure sensor

We present a miniature fiber-optic pressure sensor with a diameter of only 125 mum. The sensor works as an extrinsic Fabry-Peacuterot interferometer and the cavity length can be controlled with a resolution of about several nanometers. Also the sensor sensitivity can be easily adjusted by controlling the sensor gauge length. A passive temperature compensation scheme was used to reduce most of the sensor´s temperature dependence. Since the sensor is composed entirely of fused silica, it is reliable, biocompatible, corrosion resistant, and immune to electromagnetic interference and has high-temperature capability