Title :
Experimental and Theoretical Study of Ion Energy Distribution Function in Single and Dual Frequency RF Discharges
Author :
Rakhimova, Tatyana V. ; Braginsky, Oleg V. ; Ivanov, Vladimir V. ; Kovalev, Alexander S. ; Lopaev, Dmitry V. ; Mankelevich, Yuri A. ; Olevanov, Michael A. ; Proshina, Olga V. ; Rakhimov, Alexander T. ; Vasilieva, Anna N. ; Voloshin, Dmitry G.
Author_Institution :
Lomonosov Moscow State Univ., Moscow
Abstract :
Ion energy distribution functions (IEDFs) at the electrodes in single frequency (SF) and dual frequency (DF) radio-frequency discharges in Ar at pressures of 20 and 45 mtorr are measured and calculated. A numerical simulation of the IEDF on the base of a self-consistent particle-in-cell model with Monte Carlo collisions was performed. In addition, a semianalytical model was developed to calculate the IEDF in collisionless and collisional SF and DF plasmas. The IEDF width for the intermediate frequency case was determined from both experimental and theoretical results. The possibility of frequency decoupling is discussed.
Keywords :
Monte Carlo methods; high-frequency discharges; plasma collision processes; plasma simulation; Monte Carlo collisions; dual frequency RF discharges; frequency decoupling; ion energy distribution function; numerical simulation; particle-in-cell model; single frequency RF discharges; Argon; Distribution functions; Electrodes; Energy measurement; Frequency measurement; Monte Carlo methods; Numerical simulation; Plasma measurements; Plasma simulation; Radio frequency; Dual frequency (DF) capacitive coupled radio-frequency (RF) plasma; IEDF measurement; ion energy distribution functions (IEDFs) analytical expression; particle-in-cell (PIC) simulation; semianalytical IEDF simulation;
Journal_Title :
Plasma Science, IEEE Transactions on
DOI :
10.1109/TPS.2007.905201
