Fluid Model of an Electron Cyclotron Wave Resonance Discharge

Author

Sfikas, Spyridon A. ; Amanatides, Eleftherios K. ; Mataras, Dimitris S. ; Rapakoulias, Dimitrios E.

Author_Institution

Patras Univ., Patras

Volume

35

Issue

5

fYear

2007

Firstpage

1420

Lastpage

1425

Abstract

A fluid model of a planar electron cyclotron wave resonance argon discharge is presented. The results for a 15-mtorr argon discharge are checked against the particle in cell/Monte Carlo (PIC/MC) simulation results by R. Krimke et al. and are also compared to the analytical theory and experimental data by B. Pfeiffer. The application of a specific boundary condition for the magnetic potential, the use of an effective electron collision frequency that includes plasma nonuniformities, and the coupled solution of the electrostatic field were found to be essential parameters leading to the agreement of the fluid code with both experimental and PIC/MC findings.

Keywords

Monte Carlo methods; cyclotron resonance; discharges (electric); plasma simulation; plasma waves; RF discharges; electron collision frequency; electron cyclotron wave resonance discharge; fluid model; inductively coupled plasma; magnetic potential; particle in cell/Monte Carlo simulation; self-consistent modeling; Argon; Boundary conditions; Cyclotrons; Electrons; Frequency; Magnetic analysis; Monte Carlo methods; Plasma applications; Plasma simulation; Resonance; Electron cyclotron wave resonance (ECWR); RF discharges; fluid model; inductively coupled plasma; self-consistent modeling;

fLanguage

English

Journal_Title

Plasma Science, IEEE Transactions on

Publisher

ieee

ISSN

0093-3813

Type

jour

DOI

10.1109/TPS.2007.905946

Filename

4343192