• DocumentCode
    924063
  • Title

    Physical problems of small structures in electronics

  • Author

    Keyes, Robert W.

  • Author_Institution
    IBM T. J. Watson Research Center, Yorktown Heights, N. Y.
  • Volume
    60
  • Issue
    9
  • fYear
    1972
  • Firstpage
    1055
  • Lastpage
    1062
  • Abstract
    A steady improvement in electronic computers through nearly two decades has been made possible by continued progress in miniaturization. An obvious question is, What will eventually limit the reduction in size of electronic components? An attempt is made to formulate a quantitative view of some of the phenomena that may limit the extension of present technologies to ever smaller dimensions. Specifically treated are the problems of removing heat from small structures, of the effect of the high resistance of small conductors, and of electromigration. It is concluded that of these the resistive and electromigration effects represent the most significant limits on size, and that they will prevent the dimensions of conductors from being reduced below a few hundred angstrom units.
  • Keywords
    Atomic measurements; Costs; Data processing; Electrons; Fabrication; History; Integrated circuit technology; Lithography; Manufacturing; Physics computing;
  • fLanguage
    English
  • Journal_Title
    Proceedings of the IEEE
  • Publisher
    ieee
  • ISSN
    0018-9219
  • Type

    jour

  • DOI
    10.1109/PROC.1972.8853
  • Filename
    1450783