Title :
V.M.O.S. conductively coupled charge-coupled device
Author :
Parks, C.M. ; Salama, C.A.T.
Author_Institution :
University of Toronto, Department of Electrical Engineering, Toronto, Canada
Abstract :
A new conductively coupled stepped-oxide 2-phase charge-coupled-device structure is proposed, fabricated and tested. The structure has a narrow automatically produced oxide barrier, and allows increased packing density for charge-coupled-device arrays.
Keywords :
charge-coupled devices; semiconductor device manufacture; VMOS charge coupled device; conductive coupling;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:19730439
