• DocumentCode
    925330
  • Title

    Strain sensitivity of thin-film InSb transistor

  • Author

    Luo, F.C. ; Epstein, M.

  • Author_Institution
    Northwestern University, Evanston, Ill.
  • Volume
    61
  • Issue
    1
  • fYear
    1973
  • Firstpage
    129
  • Lastpage
    130
  • Abstract
    A thin-film InSb transistor with well-defined saturation at room temperature exhibits useful strain sensitivities.
  • Keywords
    Capacitive sensors; Crystallization; Metal-insulator structures; Piezoelectric films; Piezoelectric transducers; Structural beams; Substrates; Temperature sensors; Thin film transistors; Voltage;
  • fLanguage
    English
  • Journal_Title
    Proceedings of the IEEE
  • Publisher
    ieee
  • ISSN
    0018-9219
  • Type

    jour

  • DOI
    10.1109/PROC.1973.8985
  • Filename
    1450915
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=925330