Title :
Strain sensitivity of thin-film InSb transistor
Author :
Luo, F.C. ; Epstein, M.
Author_Institution :
Northwestern University, Evanston, Ill.
Abstract :
A thin-film InSb transistor with well-defined saturation at room temperature exhibits useful strain sensitivities.
Keywords :
Capacitive sensors; Crystallization; Metal-insulator structures; Piezoelectric films; Piezoelectric transducers; Structural beams; Substrates; Temperature sensors; Thin film transistors; Voltage;
Journal_Title :
Proceedings of the IEEE
DOI :
10.1109/PROC.1973.8985
