Title :
Strain and temperature sensitivity of very-thin low-density tantalum films
Author :
Meiksin, Z.H. ; Liang, H.B.Kuo
Author_Institution :
University of Pittsburgh, Department of Electrical Engineering, Pittsburgh, USA
Abstract :
Low-density tantalum thin films, several-hundred angstroms thick, sputtered at 1500 V can exhibit relatively stable strain-gauge factors of the order ten, after heat treatment at 150 to 200°C. Temperature compensation can be obtained by means of a bridge network energised with a current source.
Keywords :
compensation; metallic thin films; strain gauges; tantalum; thin film devices; Ta; bridge network; heat treatment; low density films; sputtered films; stable strain gauge factors; strain gauges; strain sensitivity; temperature compensation; temperature sensitivity; thin films;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:19740279
