DocumentCode
925758
Title
An analytical model for pinchoff voltage evaluation of ion-implanted GaAs MESFETs
Author
Dutt, M.B. ; Nath, Ram ; Kumar, R. ; Sharma, B.L.
Author_Institution
Solid State Phys. Lab., Delhi, India
Volume
36
Issue
4
fYear
1989
fDate
4/1/1989 12:00:00 AM
Firstpage
765
Lastpage
768
Abstract
The authors describe an analytical model for accurate evaluation of pinchoff voltage and channel thickness of ion-implanted GaAs MESFETs (metal-semiconductor field-effect transistors). A method for calculating I -V characteristics is outlined that uses pinchoff voltage and channel thickness and takes into account the effects of capping, backgating and source and drain resistances. Both single- and multiple-implantation cases are discussed
Keywords
III-V semiconductors; Schottky gate field effect transistors; gallium arsenide; semiconductor device models; GaAs; I-V characteristics; analytical model; backgating; capping; channel thickness; ion-implanted GaAs MESFETs; multiple-implantation cases; pinchoff voltage evaluation; Analytical models; Buffer layers; Doping; Fabrication; Gallium arsenide; Intrusion detection; Ion implantation; MESFETs; Semiconductor process modeling; Voltage;
fLanguage
English
Journal_Title
Electron Devices, IEEE Transactions on
Publisher
ieee
ISSN
0018-9383
Type
jour
DOI
10.1109/16.22484
Filename
22484
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