Title :
Intelligent prognostics system design and implementation
Author :
Su, Yu-chuan ; Cheng, Fan-tien ; Hung, Min-Hsiung ; Huang, Hsien-Cheng
Author_Institution :
Inst. of Manuf. Eng., Nat. Cheng Kung Univ., Tainan, Taiwan
fDate :
5/1/2006 12:00:00 AM
Abstract :
This paper proposes an intelligent prognostics system JPS) for semiconductor and TFT-LCD manufacturing. The IPS comprises several generic embedded devices (GEDs) and remote clients. The GED can be easily embedded into various types of equipment to acquire equipment engineering data and meet the specification requirements of Interface A for supporting semiconductor industry equipment engineering capabilities. Furthermore, the GED has an open-standard application interface offering pluggable and customized intelligent applications. With this feature, the intelligent applications can be distributed and localized, releasing the factory network burden and enhancing equipment reliability and processing quality. This paper also develops two typical pluggable applications: the predictive maintenance scheme (PMS) for detecting equipment faults and the virtual metrology scheme (VMS) for conjecturing equipment-processing quality. Integrating the PMS into the IPS and the VMS into the IPS are, respectively, accomplished using the conveyor equipment and the sputtering equipment in a TFT-LCD factory. These two illustrative examples clearly demonstrate that IPS is versatile, configurable, and effective.
Keywords :
intelligent manufacturing systems; liquid crystal displays; maintenance engineering; production equipment; TFT-LCD manufacturing; conveyor equipment; equipment engineering capabilities; equipment faults detection; equipment reliability; equipment-processing quality; generic embedded devices; intelligent prognostics system; open-standard application interface; predictive maintenance; remote clients; semiconductor manufacturing; sputtering equipment; virtual metrology; Data engineering; Electronics industry; Intelligent manufacturing systems; Intelligent networks; Intelligent systems; Production facilities; Pulp manufacturing; Reliability engineering; Semiconductor device manufacture; Voice mail; Equipment engineering system (EES); generic embedded device (GED); predictive maintenance; virtual metrology;
Journal_Title :
Semiconductor Manufacturing, IEEE Transactions on
DOI :
10.1109/TSM.2006.873512