• DocumentCode
    928092
  • Title

    Fine tuning of surface-acoustic-wave resonator filters with metallisation thickness

  • Author

    Haydl, W.H. ; Cross, P.S.

  • Author_Institution
    Fraunhofer Gesellschaft, Institut fÿr Angewandte Festkörperphysik, Freiburg, West Germany
  • Volume
    11
  • Issue
    12
  • fYear
    1975
  • Firstpage
    252
  • Lastpage
    253
  • Abstract
    Two-port surface-acoustic-wave resonator filters with Q factors in excess of 3000 and a sidelobe suppression of 30 dB have been fabricated from yz LiNbO3 with aluminium metallisation. The dispersion of the centre frequency with aluminium thickness has been found to be 70¿10 kHz/¿m at 35 MHz. The ability to fine tune with metal thickness has been used to compensate inherent substrate inhomogeneities and to fabricate a high-Q factor flat-top filter.
  • Keywords
    Q-factor; acoustic surface wave devices; crystal filters; crystal resonators; metallisation; tuning; 35 MHz; LiNbO3; Q factors; aluminium metallisation; centre frequency; fine tuning; flat top filter; metallisation thickness; sidelobe suppression; substrate inhomogeneities; surface acoustic wave resonator filters;
  • fLanguage
    English
  • Journal_Title
    Electronics Letters
  • Publisher
    iet
  • ISSN
    0013-5194
  • Type

    jour

  • DOI
    10.1049/el:19750190
  • Filename
    4236707