Demonstration of piezoelectric actuated GaAs-based MEMS tunable VCSEL

Author

Huang, Michael C Y ; Cheng, Kan Bun ; Zhou, Ye ; Pesala, Bala ; Chang-Hasnain, Connie J. ; Pisano, Albert P.

Author_Institution

Dept. of Electr. Eng. & Comput. Sci., Univ. of California, Berkeley, CA

Volume

18

Issue

10

fYear

2006

fDate

5/1/2006 12:00:00 AM

Firstpage

1197

Lastpage

1199

Abstract

We report the first experimental demonstration of a novel piezoelectric actuated microelectromechanical systems (MEMS) tunable vertical-cavity surface-emitting laser (VCSEL). A large physical deflection was obtained with the piezoelectric actuated MEMS cantilever beam monolithically integrated with the VCSEL distributed Bragg reflector. Single-mode emission and continuous tuning were achieved at room temperature under continuous-wave operation

Keywords

III-V semiconductors; cantilevers; distributed Bragg reflector lasers; gallium arsenide; laser cavity resonators; laser modes; laser tuning; micromechanical devices; piezoelectric actuators; surface emitting lasers; 293 to 298 K; GaAs; GaAs-based MEMS; MEMS cantilever beam; continuous tuning; continuous-wave operation; distributed Bragg reflector; monolithic integration; physical deflection; piezoelectric actuation; room temperature; single-mode emission; tunable VCSEL; Distributed Bragg reflectors; Laser theory; Laser tuning; Microelectromechanical systems; Micromechanical devices; Structural beams; Surface emitting lasers; Temperature; Tunable circuits and devices; Vertical cavity surface emitting lasers; Laser tuning; microelectromechanical systems (MEMS); vertical-cavity surface-emitting laser (VCSEL);

fLanguage

English

Journal_Title

Photonics Technology Letters, IEEE

Publisher

ieee

ISSN

1041-1135

Type

jour

DOI

10.1109/LPT.2006.873923

Filename

1629127