Title :
High-precision signal processing algorithm to evaluate SAW properties as a function of temperature
Author :
Shrena, I. ; Eisele, D. ; Bardong, J. ; Mayer, Elena ; Reindl, Leonhard M.
Author_Institution :
Dept. of Microsyst. Eng., Univ. of Freiburg, Freiburg, Germany
Abstract :
This paper presents a signal processing algorithm which accurately evaluates the SAW properties of a substrate as functions of temperature. The investigated acoustic properties are group velocity, phase velocity, propagation loss, and coupling coefficient. With several measurements carried out at different temperatures, we obtain the temperature dependency of the SAW properties. The analysis algorithm starts by reading the transfer functions of short and long delay lines. The analysis algorithm determines the center frequency of the delay lines and obtains the delay time difference between the short and long delay lines. The extracted parameters are then used to calculate the acoustic properties of the SAW material. To validate the algorithm, its accuracy is studied by determining the error in the calculating delay time difference, center frequency, and group velocity.
Keywords :
acoustic signal processing; acoustic wave propagation; acoustic wave velocity; acoustic wave velocity measurement; surface acoustic wave delay lines; surface acoustic waves; transfer functions; SAW material; SAW properties; acoustic properties; analysis algorithm; center frequency; coupling coefficient; delay time difference; group velocity; high-precision signal processing algorithm; long delay line; parameter extraction; phase velocity; propagation loss; short delay line; temperature dependence; transfer functions;
Journal_Title :
Ultrasonics, Ferroelectrics, and Frequency Control, IEEE Transactions on
DOI :
10.1109/TUFFC.2013.2629