Title :
Dislocation Density and Sheet Resistance Variations Across Semi-Insulating GaAs Wafers
Author :
Blunt, Roy T. ; Clark, Stephen ; Stirland, D.J. ; Stirland, Derek J.
Abstract :
Dislocation densities and sheet resistances have been measured across
Keywords :
Conductivity; Density measurement; Electrical resistance measurement; Electron traps; Epitaxial growth; Etching; Gallium arsenide; Ion implantation; Manufacturing; Substrates;
Journal_Title :
Microwave Theory and Techniques, IEEE Transactions on
DOI :
10.1109/TMTT.1982.1131181
