• DocumentCode
    931723
  • Title

    A Novel Deposit/Spin Waveguide Interconnection (DWSI) for Semiconductor Integrated Optics

  • Author

    Furuya, Kazuhito ; Miller, Barry I. ; Coldren, Larry A. ; Howard, Richard E.

  • Volume
    30
  • Issue
    10
  • fYear
    1982
  • Firstpage
    1771
  • Lastpage
    1777
  • Abstract
    We propose an efficient and simple optical interconnection between active semiconductor components by deposition and spin coating. Details of the waveguide design, the fabrication technique, and a promising material combination are given. Experimental results with an integrated laser-polyimide/SiO x (x ~ 2) waveguide combination demonstrate low-threshold (2.0 kA/cm 2) laser operation and a low-loss waveguide interconnection (81 percent coupling efficiency) on a GaInAaP/InP chip.
  • Keywords
    Coatings; Integrated optics; Optical device fabrication; Optical interconnections; Optical materials; Optical waveguides; Semiconductor lasers; Semiconductor materials; Semiconductor waveguides; Waveguide lasers;
  • fLanguage
    English
  • Journal_Title
    Microwave Theory and Techniques, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0018-9480
  • Type

    jour

  • DOI
    10.1109/TMTT.1982.1131319
  • Filename
    1131319
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=931723