Title :
A Novel Deposit/Spin Waveguide Interconnection (DWSI) for Semiconductor Integrated Optics
Author :
Furuya, Kazuhito ; Miller, Barry I. ; Coldren, Larry A. ; Howard, Richard E.
Abstract :
We propose an efficient and simple optical interconnection between active semiconductor components by deposition and spin coating. Details of the waveguide design, the fabrication technique, and a promising material combination are given. Experimental results with an integrated laser-polyimide/SiO x (x ~ 2) waveguide combination demonstrate low-threshold (2.0 kA/cm 2) laser operation and a low-loss waveguide interconnection (81 percent coupling efficiency) on a GaInAaP/InP chip.
Keywords :
Coatings; Integrated optics; Optical device fabrication; Optical interconnections; Optical materials; Optical waveguides; Semiconductor lasers; Semiconductor materials; Semiconductor waveguides; Waveguide lasers;
Journal_Title :
Microwave Theory and Techniques, IEEE Transactions on
DOI :
10.1109/TMTT.1982.1131319
