Title :
Defect creation in electronic materials
Author :
Cheng, Li-Jen ; Corbett, James W.
Author_Institution :
State University of New York at Albany, Albany, N.Y.
Abstract :
The status of understanding of defect creation in electronic materials, primarily semiconductors, is reviewed. Included are a survey of threshold values and a discussion of the various parameters on which the energy dependence of damage production depends. The subjects of subthreshold damage and ionization-produced damage are also discussed.
Keywords :
Atomic measurements; Electronics industry; Energy measurement; Fabrication; Fitting; Ionization; Physics; Production; Semiconductivity; Semiconductor materials;
Journal_Title :
Proceedings of the IEEE
DOI :
10.1109/PROC.1974.9597
