DocumentCode :
933246
Title :
Nondestructive Measurement of a Dielectric Layer Using Surface Electromagnetic Waves
Author :
Ou, Weiming ; Gardner, C. Gerald ; Long, Stuart A.
Volume :
31
Issue :
3
fYear :
1983
Firstpage :
255
Lastpage :
261
Abstract :
In this investigation, the possibility of nondestructively measuring the thickness and dielectric constant of a layer of dielectric material on a conducting substrate by surface electromagnetic waves (SEW) has been demonstrated. The theoretical approximate dispersion relations near cutoff were derived for both the TE and TM modes and found to be linear functions of frequency, the thickness and dielectric constant were then calculated as simple algebraic functions of the slope and intercept of the dispersion curve. An experimental apparatus utilizing a prism-coupler was constructed to excite surface electromagnetic waves in a dielectric layer whose characteristics were known. By suitable measurements of the frequency and the coupling angle of the source, the dispersion curve was determined experimentally and the resulting dielectric constant and thickness of the layer calculated.
Keywords :
Dielectric constant; Dielectric materials; Dielectric measurements; Dielectric substrates; Dispersion; Electromagnetic measurements; Electromagnetic scattering; Surface waves; Tellurium; Thickness measurement;
fLanguage :
English
Journal_Title :
Microwave Theory and Techniques, IEEE Transactions on
Publisher :
ieee
ISSN :
0018-9480
Type :
jour
DOI :
10.1109/TMTT.1983.1131472
Filename :
1131472
Link To Document :
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