Title :
Anisotropic stress in window-plated Permalloy thin films
Author_Institution :
Komag Inc., Milpitas, CA, USA
fDate :
9/1/1993 12:00:00 AM
Abstract :
Measurements of stress have been made in window-plated strips of Permalloy with different aspect ratios and the results have been related to finite-element simulations. It is found that the in-plane stresses in the window-plated strips are similar to those expected in strips fabricated from a sheet film with an initial biaxial stress state. The effect of annealing the strips is to increase the difference between the two principle in-plane stresses. The implications of this stress state for the magnetic anisotropy of the strips is discussed
Keywords :
Permalloy; annealing; electroplated coatings; ferromagnetic properties of substances; finite element analysis; magnetic anisotropy; magnetic thin films; magnetostriction; NiFe; anisotropic stress; annealing; aspect ratios; finite-element simulations; in-plane stresses; magnetic anisotropy; magnetostriction; stress state; window-plated Permalloy thin films; Anisotropic magnetoresistance; Annealing; Magnetic anisotropy; Magnetic films; Magnetic heads; Magnetostriction; Perpendicular magnetic anisotropy; Stress; Strips; Transistors;
Journal_Title :
Magnetics, IEEE Transactions on
