• DocumentCode
    933969
  • Title

    Catalyst-free GaN nanorods grown by metalorganic molecular beam epitaxy

  • Author

    Kuo, Shou-Yi ; Kei, C.C. ; Hsiao, Chien-Nan ; Chao, C.K. ; Lai, Fang-I ; Kuo, Hao-Chung ; Hsieh, Wen-Feng ; Wang, Shing-Chung

  • Author_Institution
    Instrum. Technol. Res. Center, Nat. Appl. Res. Labs., Hsinchu, Taiwan
  • Volume
    5
  • Issue
    3
  • fYear
    2006
  • fDate
    5/1/2006 12:00:00 AM
  • Firstpage
    273
  • Lastpage
    277
  • Abstract
    High-density GaN nanorods with outstanding crystal quality were grown on c-sapphire substrates by radio-frequency plasma-assisted metalorganic molecular beam epitaxy under catalyst- and template-free growth condition. Morphological and structural characterization of the GaN nanorods was employed by X-ray diffraction, energy dispersive X-ray spectroscopy, scanning electron microscopy, and high-resolution transmission electron microscopy (HRTEM). These results indicate that the rod number density can reach 1×1010 cm-2 and the nanorods are well-aligned with preferentially oriented in the c-axis direction. Meanwhile, no metallic (Ga) droplet was observed at the end of the rods, which is the intrinsic feature of vapor-liquid-solid method. Nanorods with no traces of any extended defects, as confirmed by TEM, were obtained as well. In addition, optical investigation was carried out by temperature- and power-dependent micro-photoluminescence (μ-PL). The PL peak energies are red-shifted with increasing excitation power, which is attributed to many-body effects of free carriers under high excitation intensity. The growth mechanism is discussed on the basis of the experimental results. Catalyst-free GaN nanorods presented here might have a high potential for applications in nanoscale photonic devices.
  • Keywords
    III-V semiconductors; X-ray chemical analysis; X-ray diffraction; gallium compounds; molecular beam epitaxial growth; nanostructured materials; photoluminescence; plasma materials processing; scanning electron microscopy; transmission electron microscopy; wide band gap semiconductors; Al2O3; GaN; TEM; X-ray diffraction; catalyst-free GaN nanorods growth; energy dispersive X-ray spectroscopy; excitation intensity; high-resolution transmission electron microscopy; many-body effects; microphotoluminescence; morphological characterization; nanoscale photonic devices; radio-frequency plasma-assisted metalorganic molecular beam epitaxy; sapphire substrates; scanning electron microscopy; structural characterization; vapor-liquid-solid method; Gallium nitride; Molecular beam epitaxial growth; Nanoscale devices; Plasma density; Plasma x-ray sources; Radio frequency; Scanning electron microscopy; Substrates; Transmission electron microscopy; X-ray diffraction; Catalyst free; GaN nanorod; metalorganic molecular-beam epitaxy; nanotechnology;
  • fLanguage
    English
  • Journal_Title
    Nanotechnology, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    1536-125X
  • Type

    jour

  • DOI
    10.1109/TNANO.2006.874055
  • Filename
    1632147