Title :
Comparison of methods for determining the capacitance of planar transmission lines with application to multichip module characterization
Author :
Lipa, Steven ; Steer, Michael B. ; Morris, Arthur S. ; Franzon, Paul D.
Author_Institution :
Dept. of Electr. & Comput. Eng., North Carolina State Univ., Raleigh, NC, USA
fDate :
5/1/1993 12:00:00 AM
Abstract :
The techiques for determining the capacitance of embedded interconnects in an MCM-D MCM (multichip module) are compared. The error is estimating this capacitance in generally the greatest contributor to the overall error in determining the impedance of interconnects and discontinuities. Using in situ calibration microwave characterization of various MCM interconnects fabricated using an alumina on polyimide MCM-D process is reported
Keywords :
capacitance measurement; integrated circuit testing; microwave measurement; multichip modules; alumina on polyimide MCM-D process; capacitance; embedded interconnects; in situ calibration; microwave characterization; multichip module characterization; planar transmission lines; Calibration; Capacitance measurement; Electrical resistance measurement; Frequency; Microwave measurements; Microwave theory and techniques; Multichip modules; Planar transmission lines; Probes; Transmission line measurements;
Journal_Title :
Components, Hybrids, and Manufacturing Technology, IEEE Transactions on
