Title :
In situ measurements of arsenic losses during annealing of the usual evaporated contacts of GaAs Gunn diodes
Author :
Sebestyen, T. ; Menyhard, M. ; Szigethy, D.
Author_Institution :
Hungarian Academy of Sciences, Research Institute for Technical Physics, Budapest, Hungary
Abstract :
Measurements of the arsenic losses during alloying of the usual evaporated metal contact systems of GaAs Gunn diodes are given. The results were obtained by making in situ alloying processes in a mass spectrometer. Curves of As2 yields are given as functions of temperature and time.
Keywords :
Gunn diodes; annealing; electrical contacts; As losses; As2 yields; GaAs Gunn diodes; alloying processes; annealing; evaporated contacts;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:19760075
