• DocumentCode
    936720
  • Title

    V-groove-isolated i.i.l. circuits

  • Author

    Declercq, M.J. ; de Moor, J.P. ; Jespers, P.G. ; Sevrin, A.M.

  • Author_Institution
    Université Catholique de Louvain, Laboratoire de Microélectronique, Louvain-la-Neuve, Belgium
  • Volume
    12
  • Issue
    6
  • fYear
    1976
  • Firstpage
    150
  • Lastpage
    151
  • Abstract
    A new method using V-grooves for dielectric isolation of i.i.l. circuits is described. Basic devices and circuits have been realised and tested. The process results in a simplified, low-temperature isolation step and yields an increased packing density.
  • Keywords
    digital integrated circuits; logic circuits; monolithic integrated circuits; I2L; V-groove isolated IIL circuits; dielectric isolation; integrated injection logic;
  • fLanguage
    English
  • Journal_Title
    Electronics Letters
  • Publisher
    iet
  • ISSN
    0013-5194
  • Type

    jour

  • DOI
    10.1049/el:19760117
  • Filename
    4239667
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=936720