Title :
V-groove-isolated i.i.l. circuits
Author :
Declercq, M.J. ; de Moor, J.P. ; Jespers, P.G. ; Sevrin, A.M.
Author_Institution :
Université Catholique de Louvain, Laboratoire de Microélectronique, Louvain-la-Neuve, Belgium
Abstract :
A new method using V-grooves for dielectric isolation of i.i.l. circuits is described. Basic devices and circuits have been realised and tested. The process results in a simplified, low-temperature isolation step and yields an increased packing density.
Keywords :
digital integrated circuits; logic circuits; monolithic integrated circuits; I2L; V-groove isolated IIL circuits; dielectric isolation; integrated injection logic;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:19760117
