Design and fabrication of the detector technology for SCUBA-2

Author

Walton, A.J. ; Parkes, W. ; Terry, J.G. ; Dunare, C. ; Stevenson, J.T.M. ; Gundlach, A.M. ; Hilton, G.C. ; Irwin, K.D. ; Ullom, J.N. ; Holland, W.S. ; Duncan, W.D. ; Audley, M.D. ; Ade, P.A.R. ; Sudiwala, R.V. ; Schulte, E.

Author_Institution

Scottish Microelectron. Centre, Univ. of Edinburgh, UK

Volume

151

Issue

2

fYear

2004

fDate

3/3/2004 12:00:00 AM

Firstpage

110

Lastpage

120

Abstract

The design and fabrication is described of the prototype IR detector for the SCUBA-2 80×80 pixel array (Submillimetre Common User Bolometer Array), which is to be mounted on the James Clerk Maxwell Telescope in Hawaii. The detector technology is based on silicon micromachining, with transition edge sensors (TES) being used to detect incoming radiation with wavelengths of 450 and 850 μm. Each TES is located on a λ/4 silicon brick suspended on a silicon nitride membrane and supported by a silicon micromachined waffle. Low-temperature indium bump bonding connects each TES to a SQUID multiplexer chip. The paper details the design considerations and the technology used to fabricate the detector wafer.

Keywords

SQUIDs; astronomical instruments; bolometers; elemental semiconductors; infrared astronomy; infrared detectors; micromachining; silicon; silicon compounds; submillimetre wave detectors; 450 micron; 850 micron; Hawaii; James Clerk Maxwell Telescope; James Clerk Maxwell telescope; SCUBA-2; SQUID multiplexer chip; Si; SiN; detector technology; detector wafer; low-temperature indium bump bonding connect; pixel array; prototype IR detector; silicon brick; silicon micromachined waffle; silicon micromachining; silicon nitride membrane; submillimetre common user bolometer array; transition edge sensors;

fLanguage

English

Journal_Title

Science, Measurement and Technology, IEE Proceedings -

Publisher

iet

ISSN

1350-2344

Type

jour

DOI

10.1049/ip-smt:20040088

Filename

1278145