DocumentCode
936931
Title
Laser probing of a surface-acoustic-wave resonator
Author
Hartemann, P. ; Rouvaen, J. ; Torguet, R. ; Bridoux, E. ; Bruneel, C.
Author_Institution
Thomson-CSF, Laboratoire Central de Recherches, Orsay, France
Volume
12
Issue
7
fYear
1976
Firstpage
176
Lastpage
177
Abstract
An acoustic surface-wave resonator was studied using a heterodyning laser probe. The resonator consists in two periodic gratings ion-implanted in an ST cut-quartz substrate and an interdigital transducer deposited between gratings. The positioning of the transducer with respect to the standing wave pattern was investigated, the frequency being about 125 MHz. The variation of the transducer impedance around the resonance frequency is a function of this positioning and it was established that the greatest impedance change is obtained when the transducer fingers are in coincidence with the standing wave antinodes of the displacement perpendicular to the surface.
Keywords
acoustic surface wave devices; laser beam applications; resonators; 125 MHz; heterodyning laser probe; interdigital transducer; laser probing; periodic gratings; quartz substrate; resonance frequency; standing wave pattern; surface acoustic wave resonator; transducer impedance;
fLanguage
English
Journal_Title
Electronics Letters
Publisher
iet
ISSN
0013-5194
Type
jour
DOI
10.1049/el:19760137
Filename
4239690
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