Title :
E-beam-induced fabrication of microstructures
Author :
Brünger, W.H. ; Kohlmann, K.T.
Author_Institution :
Fraunhofer-Inst. fur Siliziumtechnologie, Berlin, Germany
fDate :
3/1/1993 12:00:00 AM
Abstract :
E-beam-induced deposition of tungsten, W, from a metal-organic gas has been used for the formation of microstructures of various geometries. Three examples have been selected for demonstration: line deposition, needle growth, and bridge formation. Important parameters of the W deposition process from W(CO)6 gas are given, among them minimum feature size, positional accuracy, and growth rate
Keywords :
electron beam deposition; electron beam lithography; micromechanical devices; nanotechnology; tungsten; W; W deposition; W(CO)6 precursor; bridge formation; electron beam induced fabrication; growth rate; line deposition; micromachined structures; microstructure fabrication; minimum feature size; multifunctional microsystems; nanotechnology; needle growth; positional accuracy; Bridges; Chemical elements; Electron beams; Fabrication; Fluid flow; Geometry; Microstructure; Needles; Scanning electron microscopy; Tungsten;
Journal_Title :
Microelectromechanical Systems, Journal of
