• DocumentCode
    937254
  • Title

    Fabrication of planar Gunn-effect logic device with self-aligned Schottky-barrier gates

  • Author

    Wada, O. ; Yanagisawa, S. ; Takanashi, Hiroyuki

  • Author_Institution
    Fujitsu Laboratories Ltd., Kawasaki, Japan
  • Volume
    12
  • Issue
    9
  • fYear
    1976
  • Firstpage
    215
  • Lastpage
    217
  • Abstract
    A method of fabricating planar Gunn-effect devices with Schottky-barrier gates has been improved by using the self-alignment technique. Dual-gate devices fabricated by this method have fine geometries and exhibited sufficiently good performance.
  • Keywords
    Gunn devices; logic devices; semiconductor device manufacture; dual gate devices; planar Gunn effect logic device; self aligned Schottky barrier gates;
  • fLanguage
    English
  • Journal_Title
    Electronics Letters
  • Publisher
    iet
  • ISSN
    0013-5194
  • Type

    jour

  • DOI
    10.1049/el:19760167
  • Filename
    4239726
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=937254