Title :
Characterisation of time resolution in electron beam measurements (IC testing)
Author :
Girard, P. ; Nouet, Pascal
Author_Institution :
Lab. d´Inf. de Robotique, Montpelier II Univ. Sci. et Tech. du Languedoc, France
Abstract :
A method allowing the determination of time resolution in the electron beam testing of integrated circuits is presented, and experimentally validated. The effect of the extraction field on time resolution is clearly demonstrated. It is also shown that a simple formulation of the transit time effect agrees well with experimental data.
Keywords :
electron beam testing; integrated circuit testing; electron beam measurements; electron beam testing; extraction field; integrated circuits; monolithic IC; time resolution; transit time effect;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:19931093
