Title :
Crystallisation phenomena of native anodic oxides for GaAs devices
Author :
Weiss, B.L. ; Hartnagel, H.L.
Author_Institution :
University of Newcastle upon Tyne, Department of Electrical & Electronic Engineering, Newcastle upon Tyne, UK
Abstract :
Results are presented which show the crystallisation processes and changes in the composition of native anodic oxides produced by annealing in a nitrogen atmosphere.
Keywords :
III-V semiconductors; annealing; gallium arsenide; semiconductor device manufacture; GaAs devices; annealing; crystallisation processes; native anodic oxides;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:19760246
