• DocumentCode
    938052
  • Title

    Crystallisation phenomena of native anodic oxides for GaAs devices

  • Author

    Weiss, B.L. ; Hartnagel, H.L.

  • Author_Institution
    University of Newcastle upon Tyne, Department of Electrical & Electronic Engineering, Newcastle upon Tyne, UK
  • Volume
    12
  • Issue
    13
  • fYear
    1976
  • Firstpage
    321
  • Lastpage
    322
  • Abstract
    Results are presented which show the crystallisation processes and changes in the composition of native anodic oxides produced by annealing in a nitrogen atmosphere.
  • Keywords
    III-V semiconductors; annealing; gallium arsenide; semiconductor device manufacture; GaAs devices; annealing; crystallisation processes; native anodic oxides;
  • fLanguage
    English
  • Journal_Title
    Electronics Letters
  • Publisher
    iet
  • ISSN
    0013-5194
  • Type

    jour

  • DOI
    10.1049/el:19760246
  • Filename
    4239825
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=938052