• DocumentCode
    939356
  • Title

    Sampling-mode scanning electron microscope for probing fast voltage waveforms

  • Author

    Gopinathan, K.G. ; Thomas, P.R. ; Gopinath, Anand ; Owens, A.R.

  • Author_Institution
    University College of North Wales, School of Electronic Engineering Science, Bangor, UK
  • Volume
    12
  • Issue
    19
  • fYear
    1976
  • Firstpage
    501
  • Lastpage
    502
  • Abstract
    Sampling-oscilloscope-type circuitry has been interfaced with an s.e.m., which allows the resolution of fast voltage wave-forms on devices up to gigahertz repetition frequencies. The sampling is performed by 100 ps-wide beam pulses, at a maximum sampling rate of 1 MHz. Voltage contrast linearisation has a resolution of 100 mV at an average current of 10¿11 A for a 12.5 kV beam and a settling time of 30 ms.
  • Keywords
    electron microscopes; voltage measurement; fast voltage waveforms; gigahertz repetition frequencies; sampling mode SEM; scanning electron microscope; voltage contrast linearisation;
  • fLanguage
    English
  • Journal_Title
    Electronics Letters
  • Publisher
    iet
  • ISSN
    0013-5194
  • Type

    jour

  • DOI
    10.1049/el:19760380
  • Filename
    4240064
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=939356