DocumentCode
939455
Title
Wide-Tunable Low-Field Interdigitated Barium Strontium Titanate Capacitors
Author
Al Ahmad, Mahmoud ; Brunet, Magali ; Payan, Sandrine ; Michau, Dominique ; Maglione, Mario ; Plana, Robert
Author_Institution
Univ. de Toulouse, Toulouse
Volume
17
Issue
11
fYear
2007
Firstpage
769
Lastpage
771
Abstract
This letter reports low-field wide-tunable interdigitated barium strontium titanate (BST) capacitors. The capacitors consisting of BST thin film dielectric, silicon substrate, and gold metallization have been fabricated. The capacitance exhibits 0.2 pF at zero-bias and shows a tunability of 63% with an applied electric field of 1.4 V/mum. This corresponds to a 3.5 mum electrode gap width and a 5 V dc bias. Microwave measurements reveal a zero bias film quality of 50 around 30 GHz.
Keywords
barium compounds; dielectric thin films; silicon; tuning; varactors; BST thin film dielectric; Si - Surface; capacitance 0.2 pF; gold metallization; microwave measurements; silicon substrate; tunable circuit; varactors; voltage 5 V; wide-tunable low-field interdigitated barium strontium titanate capacitors; Barium strontium titanate (BST); capacitors; thin film; tunable circuit; varactors;
fLanguage
English
Journal_Title
Microwave and Wireless Components Letters, IEEE
Publisher
ieee
ISSN
1531-1309
Type
jour
DOI
10.1109/LMWC.2007.908044
Filename
4357992
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