Performance of DC SQUIDs fabricated on 4-inch silicon wafer

A Nb/AlO/sub x//Nb Josephson process has been developed to fabricate DC superconducting quantum interference devices (SQUIDs) for biomagnetic measurements on 4-in silicon wafers. The purpose of the process is to fabricate high-quality junctions and to keep the quality uniform over a silicon wafer. All the films were deposited using magnetron sputtering. The components of the SQUID, except the junctions, were formed by taper etching to improve the step coverage. The uniformity of the SQUID characteristics (critical current, modulation depth, and mutual inductance between SQUID and modulation coil) was measured, and an excellent value of less than +or-5% was obtained. Three different configurations of SQUIDs, single washer (SW), double washer series (DWS), double washer parallel (DWP) have been fabricated with the same characteristics. The SW (single washer) had a white noise level of 6.3*10/sup -6/ Phi /sub 0// square root Hz, lower than those of DWS and DWP. 1/f crossover frequencies were below 1 Hz.<>