Octagonal washer DC SQUIDs and integrated susceptometers fabricated in a planarized sub- mu m Nb-AlO/sub x/-Nb technology

The authors have designed, fabricated, and measured a number of Nb-AlO/sub x/-Nb octagonal washer DC superconducting quantum interference devices (SQUIDs) and miniature DC SQUID susceptometers having minimum feature size down to 0.5 mu m. With SQUID inductance values on the order of 100 pH, typical noise performance is better than 1 mu Phi /sub 0// square root Hz. The small minimum feature size of input coils and pickup loop structures will facilitate tight coupling to a wide variety of systems ranging from submicron particles and structures to conventional approximately mu H input circuits. A single-washer SQUID with an 80-turn 0.5- mu m-linewidth, 630-nH input coil has user-friendly V- Phi (voltage-flux) curves and a coupled energy sensitivity of 20 h at 4.2 K. Susceptometers with pickup loops ranging from 20- mu m to 0.8- mu m across have very user-friendly V- Phi curves and a resolution of order 100 mu /sub B// square root Hz at 4.2 K for devices with the smallest loops.<>