Synthesis and processing of thin films in the Tl-Ca-Ba-Cu-O system

Author

Ginley, D.S. ; Martens, J.S. ; Venturini, E.L. ; Tigges, C.P. ; Ashby, C. ; Volk, S.

Author_Institution

Sandia Nat. Lab., Albuquerque, NM, USA

Volume

3

Issue

1

fYear

1993

fDate

3/1/1993 12:00:00 AM

Firstpage

1201

Lastpage

1204

Abstract

A number of key processing issues have been identified for the film growth and the subsequent processing of thin films in the Tl-Ca-Ba-Cu-O system. The interrelationship between the precursor and the typical ex-situ process schemes is examined. An aqueous photolithographic process technology for submicron device fabrication without significant degradation of the surface resistance and the use of rapid thermal processing for contact anneals are discussed.<>

Keywords

barium compounds; calcium compounds; ceramics; high-temperature superconductors; photolithography; pulsed laser deposition; rapid thermal processing; sintering; sputtered coatings; superconducting thin films; surface phenomena; thallium compounds; vapour deposited coatings; HTSC; Tl-Ca-Ba-Cu-O; annealing; aqueous photolithographic process technology; contact anneals; electron beam evaporation; laser ablation; processing; rapid thermal processing; sintering; sputtering; submicron device fabrication; surface resistance; thin films; Annealing; Ceramics; Gold; Laboratories; Magnetic films; Optical films; Optical materials; Substrates; Temperature; Transistors;

fLanguage

English

Journal_Title

Applied Superconductivity, IEEE Transactions on

Publisher

ieee

ISSN

1051-8223

Type

jour

DOI

10.1109/77.233336

Filename

233336