DocumentCode
940071
Title
Frequency/stress sensitivity of s.a.w. resonators
Author
Dias, J. Fleming ; Karrer, H. Edward ; Kusters, John A. ; Adams, Charles A.
Author_Institution
Hewlett-Packard Laboratories, Palo Alto, USA
Volume
12
Issue
22
fYear
1976
Firstpage
580
Lastpage
582
Abstract
Surface-acoustic-wave resonators can be used as stress sensors for measuring force and pressure. Experiments at 160 MHz using rotated y-cut substrates indicate that larger linear changes in resonator frequency can be obtained by deforming the substrate. The s.a.w. transducers, besides being small in size, are also stable in frequency.
Keywords
acoustic surface wave devices; crystal resonators; pressure transducers; stress measurement; ultrasonic transducers; SAW resonators; frequency/stress sensitivity; resonator frequency; stress sensors;
fLanguage
English
Journal_Title
Electronics Letters
Publisher
iet
ISSN
0013-5194
Type
jour
DOI
10.1049/el:19760442
Filename
4240170
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