Title :
Frequency/stress sensitivity of s.a.w. resonators
Author :
Dias, J. Fleming ; Karrer, H. Edward ; Kusters, John A. ; Adams, Charles A.
Author_Institution :
Hewlett-Packard Laboratories, Palo Alto, USA
Abstract :
Surface-acoustic-wave resonators can be used as stress sensors for measuring force and pressure. Experiments at 160 MHz using rotated y-cut substrates indicate that larger linear changes in resonator frequency can be obtained by deforming the substrate. The s.a.w. transducers, besides being small in size, are also stable in frequency.
Keywords :
acoustic surface wave devices; crystal resonators; pressure transducers; stress measurement; ultrasonic transducers; SAW resonators; frequency/stress sensitivity; resonator frequency; stress sensors;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:19760442
