Title :
ZnO film concave transducer for focusing radiation of microwave ultrasound
Author_Institution :
Tohoku University, Research Institute of Electrical Communication, Sendai, Japan
Abstract :
A ZnO piezoelectric film has been satisfactorily deposited on a concave substrate of a gold hemispherical shell to produce a concave transducer for microwave ultrasound. The fabrication process of the concave transducer, with a focal distance of 5¿9 mm, and also experiments on focusing radiation in water at 100 MHz. are described.
Keywords :
focusing; piezoelectric thin films; piezoelectric transducers; ultrasonic transducers; zinc compounds; ZnO piezoelectric film; concave substrate; concave transducer; gold hemispherical shell; microwave ultrasound;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:19760453
