Title :
Tunable high-finesse InP/air MOEMS filter
Author :
Garrigues, M. ; Danglot, J. ; Leclercq, J.L. ; Parillaud, O.
Author_Institution :
Ecole Centrale de Lyon, LEOM UMR CNRS, Ecully, France
fDate :
7/1/2005 12:00:00 AM
Abstract :
We have fabricated Fabry-Pe´rot tunable filters based on a multi-air-gap/InP suspended structure. High spectral selectivity is achieved by displacing the resonant cavity into the high index material rather than in air. This configuration reduces the lateral losses of the cavity. The filters feature a bidirectional electrostatic actuation. A spectral linewidth better than 0.15 nm over a tuning range of 40 nm is experimentally demonstrated.
Keywords :
cavity resonators; indium compounds; micro-optics; microactuators; optical fabrication; optical filters; optical losses; optical tuning; spectral line breadth; Fabry-Perot filters; InP/air filter; MOEMS filter; bidirectional actuation; electrostatic actuation; high index material; high-finesse filter; lateral loss reduction; resonant cavity displacement; spectral linewidth; spectral selectivity; suspended structure; tunable filter; Air cleaners; Air gaps; Biomembranes; Indium phosphide; Mirrors; Optical filters; Optical losses; Optical materials; Optical resonators; Resonance; Fabry–PÉrot interferometers; microelectromechanical devices; micromachining; optical filters; tunable filters;
Journal_Title :
Photonics Technology Letters, IEEE
DOI :
10.1109/LPT.2005.848401
