Title :
Pixelless 1.5-μm up-conversion imaging device fabricated by wafer fusion
Author :
Ban, D. ; Hui Luo ; Liu, H.C. ; Wasilewski, Z.R. ; Buchanan, M.
Author_Institution :
Inst. for Microstruct. Sci., Nat. Res. Council of Canada, Ottawa, Ont., Canada
fDate :
7/1/2005 12:00:00 AM
Abstract :
We designed and fabricated a first-ever pixelless optical up-conversion imaging device using wafer-fusion technology. The device consists of an In/sub 0.53/Ga/sub 0.47/As-InP p-i-n detector and a GaAs-AlGaAs light-emitting diode (LED), which were grown on an InP and a GaAs substrate, respectively, and wafer-bonded together. The layer structures and doping profiles of the common region linking the detector and LED were designed such that lateral carrier diffusion was successfully suppressed while effective electrical connection was well preserved. Pixelless up-conversion imaging from 1.5 to 0.87 μm was demonstrated. Moreover, an internal electrical gain of over 100 was observed for the detector part of the integrated device. The internal up-conversion quantum efficiency was measured to be /spl sim/50% at room temperature.
Keywords :
III-V semiconductors; doping profiles; gallium arsenide; image convertors; image sensors; indium compounds; infrared imaging; integrated optoelectronics; light emitting diodes; optical frequency conversion; p-i-n photodiodes; photodetectors; semiconductor doping; wafer bonding; 1.5 to 0.87 mum; 20 degC; GaAs substrate; GaAs-AlGaAs; GaAs-AlGaAs light-emitting diode; In/sub 0.53/Ga/sub 0.47/As-InP; In/sub 0.53/Ga/sub 0.47/As-InP p-i-n detector; InP substrate; LED; doping profiles; internal up-conversion quantum efficiency; lateral carrier diffusion; layer structures; pixelless up-conversion imaging device; room temperature; wafer-fusion technology; Detectors; Doping profiles; Gallium arsenide; Indium phosphide; Light emitting diodes; Optical design; Optical devices; Optical imaging; PIN photodiodes; Pixel; Charge coupled devices (CCDs); image converters; infrared image sensors; light-emitting diodes (LEDs); optical frequency conversion; pixelless imaging; wafer-fusion;
Journal_Title :
Photonics Technology Letters, IEEE
DOI :
10.1109/LPT.2005.849987