Title :
Integrated direction-sensitive flowmeter
Author :
van Riet, R.W.M. ; Huijsing, J.H.
Author_Institution :
Delft University of Technology, Electronic Instrumentation Laboratory, Department of Electrical Engineering, Delft, Netherlands
Abstract :
Careful investigation of the cooling of a heated body in a flow shows that in integrated silicon technology a very small flowmeter can be made with a well defined direction-sensitive response over a wide range of flow speeds.
Keywords :
anemometers; bipolar integrated circuits; flowmeters; thermoelectric devices; transducers; Si technology; bipolar transistors; integrated direction sensitive flowmeter;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:19760497
