A superconductive integrated circuit foundry

Author

Abelson, L.A. ; Thomasson, S.L. ; Murduck, J.M. ; Elmadjian, R. ; Akerling, G. ; Kono, R. ; Chan, H.W.

Author_Institution

TRW Space & Technol. Group, Redondo Beach, CA, USA

Volume

3

Issue

1

fYear

1993

fDate

3/1/1993 12:00:00 AM

Firstpage

2043

Lastpage

2049

Abstract

A foundry has been established for production of superconductive integrated circuits, modeled after semiconductor application-specific integrated circuit (IC) production. The foundry supports and improves standardized Nb-based IC processing, and develops advanced processes such as a novel NbN-based process. The authors discuss the operation of the foundry, standardized process technologies, design rules, process flows, in-line product tracking, statistical process control, and automated parametric testing. The advantages of fine-line lithography and a class 10/100 environment are presented. Internal and external customer support with standard layout and circuit design tools enables reliable, quick turnaround production of a wide range of circuits. Finally, the authors present examples of concurrent device and process development towards improved, denser circuits, while maintaining a disciplined foundry environment.<>

Keywords

automatic testing; integrated circuit manufacture; lithography; statistical process control; superconducting integrated circuits; Nb based circuits; NbN based circuits; advanced processes; automated parametric testing; circuit design tools; customer support; design rules; fine-line lithography; in-line product tracking; layout design tools; operation; process flows; standardized process technologies; statistical process control; superconductive integrated circuit foundry; Application specific integrated circuits; Circuit testing; Foundries; Integrated circuit modeling; Integrated circuit technology; Process control; Process design; Production; Superconducting integrated circuits; Superconductivity;

fLanguage

English

Journal_Title

Applied Superconductivity, IEEE Transactions on

Publisher

ieee

ISSN

1051-8223

Type

jour

DOI

10.1109/77.233455

Filename

233455