Title :
Effect of substrate temperature on d.c.-sputtered antimony-doped tin-dioxide films
Author :
Sabnis, A.G. ; Chang, Kuang-Yeh
Author_Institution :
University of Pittsburgh, Department of Electrical Engineering, Pittsburgh, USA
Abstract :
The conductivity of d.c.-sputtered Sb-doped tin-dioxide films improves with higher substrate substrate temperatures. The conductivity is stable and is not influenced by the substrate material. Heating in open air does not deteriorate the film conductivity. The films are over 90% transparent in the visible spectrum.
Keywords :
antimony; electronic conduction in crystalline semiconductor thin films; semiconductor materials; sputtering; tin compounds; DC sputtered films; Sb doped SnO2; conductivity; substrate temperature effect;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:19770079
