• DocumentCode
    941733
  • Title

    Effect of substrate temperature on d.c.-sputtered antimony-doped tin-dioxide films

  • Author

    Sabnis, A.G. ; Chang, Kuang-Yeh

  • Author_Institution
    University of Pittsburgh, Department of Electrical Engineering, Pittsburgh, USA
  • Volume
    13
  • Issue
    4
  • fYear
    1977
  • Firstpage
    113
  • Lastpage
    114
  • Abstract
    The conductivity of d.c.-sputtered Sb-doped tin-dioxide films improves with higher substrate substrate temperatures. The conductivity is stable and is not influenced by the substrate material. Heating in open air does not deteriorate the film conductivity. The films are over 90% transparent in the visible spectrum.
  • Keywords
    antimony; electronic conduction in crystalline semiconductor thin films; semiconductor materials; sputtering; tin compounds; DC sputtered films; Sb doped SnO2; conductivity; substrate temperature effect;
  • fLanguage
    English
  • Journal_Title
    Electronics Letters
  • Publisher
    iet
  • ISSN
    0013-5194
  • Type

    jour

  • DOI
    10.1049/el:19770079
  • Filename
    4240412
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=941733