Fabrication and tunneling characteristics of low-leakage All-YBa/sub 2/Cu/sub 3/O/sub 7-x/ edge junctions

All-YBa/sub 2/Cu/sub 3/O/sub 7/ (YBCO) superconductor-insulator superconductor tunnel edge junctions have been fabricated. Y/sub 2/O/sub 3/ is used as the barrier material. YBCO and Y/sub 2/O/sub 3/ are deposited by electron-beam evaporation under the same deposition conditions. Special attention is paid to creating a smooth base-electrode edge by ion-mill etching. The junction width is reduced to submicron size in order to avoid defects in the junction region. The YBCO superconductive gap structure observed in dynamic conductance, measurements is very pronounced. Quasi-particle tunneling is observed with very low leakage in the subgap region. No zero-bias anomalies are present. The edge junction fabrication and the junction tunneling characteristics are discussed.<>