Title :
Processing, electrical and microwave properties of sputtered Tl-Ca-Ba-Cu-O superconducting thin films
Author :
Subramanyam, G. ; Kapoor, V.J. ; Chorey, C.M. ; Bhasin, K.B.
Author_Institution :
Dept. of Electr. & Comput. Eng., Cincinnati Univ., OH, USA
fDate :
3/1/1993 12:00:00 AM
Abstract :
A reproducible fabrication process has been established for TlCaBaCuO thin films on LaAlO/sub 3/ substrates by RF magnetron sputtering and post-deposition processing methods. Electrical transport properties of the thin films were measured on patterned four-probe test devices. Microwave properties of the films were obtained from unloaded Q measurements of all-superconducting ring resonators. This paper describes the processing, electrical and microwave properties of Tl/sub 2/Ca/sub 1/Ba/sub 2/Cu/sub 2/O/sub x/ (2122) phase thin films.<>
Keywords :
Q-factor; X-ray diffraction examination of materials; calcium compounds; critical current density (superconductivity); electric resistance measurement; high-temperature superconductors; microstrip lines; microwave measurement; penetration depth (superconductivity); sputter deposition; superconducting junction devices; surface conductivity; thallium compounds; 12 GHz; 2122 phase; 77 K; LaAlO/sub 3/ substrate; Q value; Tl/sub 2/CaBa/sub 2/Cu/sub 2/O/sub x/ superconducting thin film; X-ray diffraction analysis; critical current density; high temperature superconductor; microstrip ring resonators; penetration depth; sputter deposition; surface resistance; Electric variables measurement; Fabrication; Microwave devices; Microwave measurements; Optical ring resonators; Q measurement; Radio frequency; Sputtering; Testing; Thin film devices;
Journal_Title :
Applied Superconductivity, IEEE Transactions on
