Light dependence of partially depleted SOI-MOSFET´s using SIMOX substrates

Author

Werner, Ralph ; Zimmermann, Christoph ; Kalz, Andreas

Author_Institution

Fraunhofer-Inst. of Micro-electronic Circuits & Syst., Duisburg, Germany

Volume

42

Issue

9

fYear

1995

fDate

9/1/1995 12:00:00 AM

Firstpage

1653

Lastpage

1656

Abstract

The optical dependence of partially depleted MOSFET´s on SIMOX substrates is investigated. Measurements of the electrical and optical characteristics are presented. In order to make use of the threshold voltage shift due to optical generation of carriers in the film a comparator circuit was realized, which can be switched by a light pulse. Possible applications can be found in the optically coupled signal transmission in the lower frequency range for intelligent power devices

Keywords

MOSFET; SIMOX; comparators (circuits); field effect transistor switches; photoconducting switches; SIMOX substrates; comparator circuit; electrical characteristics; film; intelligent power devices; light pulse switching; optical carrier generation; optical characteristics; optically coupled signal transmission; partially depleted SOI-MOSFETs; threshold voltage; Coupling circuits; Electric variables measurement; Optical coupling; Optical devices; Optical films; Optical pulse generation; Pulse circuits; Substrates; Switching circuits; Threshold voltage;

fLanguage

English

Journal_Title

Electron Devices, IEEE Transactions on

Publisher

ieee

ISSN

0018-9383

Type

jour

DOI

10.1109/16.405280

Filename

405280