Title :
Light dependence of partially depleted SOI-MOSFET´s using SIMOX substrates
Author :
Werner, Ralph ; Zimmermann, Christoph ; Kalz, Andreas
Author_Institution :
Fraunhofer-Inst. of Micro-electronic Circuits & Syst., Duisburg, Germany
fDate :
9/1/1995 12:00:00 AM
Abstract :
The optical dependence of partially depleted MOSFET´s on SIMOX substrates is investigated. Measurements of the electrical and optical characteristics are presented. In order to make use of the threshold voltage shift due to optical generation of carriers in the film a comparator circuit was realized, which can be switched by a light pulse. Possible applications can be found in the optically coupled signal transmission in the lower frequency range for intelligent power devices
Keywords :
MOSFET; SIMOX; comparators (circuits); field effect transistor switches; photoconducting switches; SIMOX substrates; comparator circuit; electrical characteristics; film; intelligent power devices; light pulse switching; optical carrier generation; optical characteristics; optically coupled signal transmission; partially depleted SOI-MOSFETs; threshold voltage; Coupling circuits; Electric variables measurement; Optical coupling; Optical devices; Optical films; Optical pulse generation; Pulse circuits; Substrates; Switching circuits; Threshold voltage;
Journal_Title :
Electron Devices, IEEE Transactions on
