Title :
Application-oriented 33 GHz E/D-PMODFET static prescaler fabricated using optical lithography
Author :
Rohdin, Hans ; Jekat, Hans ; Nagy, Avelina
Author_Institution :
Hewlett-Packard Co., Palo Alto, CA, USA
fDate :
9/1/1995 12:00:00 AM
Abstract :
We report the 33 GHz operation of a packaged divide-by-32/64 static prescaler designed for instrument applications. The technology uses 0.1-μm enhancement- and depletion-mode (E/D) MODFET´s with pseudomorphic InGaAs channels (on GaAs substrate) defined by optical lithography and a self-limiting oxide spacer technique
Keywords :
HEMT integrated circuits; dividing circuits; field effect logic circuits; integrated circuit packaging; photolithography; prescalers; scaling circuits; 0.1 micron; 33 GHz; GaAs; GaAs substrate; HEMT; InGaAs; PMODFET static prescaler; SCFL; depletion-mode; enhancement-mode; instrument applications; optical lithography; packaged divide-by-32/64 prescaler; pseudomorphic InGaAs channels; pseudomorphic MODFET; self-limiting oxide spacer technique; Doping; Etching; HEMTs; Instruments; Lithography; MODFETs; Ohmic contacts; Optical buffering; Optical superlattices; Packaging;
Journal_Title :
Electron Devices, IEEE Transactions on
