Title :
Inclusion of conductivity in silicon s.a.w. component design
Author :
Venema, A. ; Humphryes, R.F.
Author_Institution :
Delft University of Technology, Department of Electrical Engineering Laboratory for Electrical Materials, Delft, Netherlands
Abstract :
An equivalent circuit is described for a surface-acoustic-wave delay line utilising interdigital transducers in a multilayered medium with a conductive silicon substrate. Attention is paid to practical material parameters for the ultimate realisation of the monolithic integration of surface-acoustic-wave and electronic components on the same silicon slice.
Keywords :
acoustic surface wave devices; equivalent circuits; ultrasonic delay lines; Si SAW component design; conductivity; equivalent circuit; interdigital transducers; monolithic integration; multilayered medium; surface acoustic wave delay line;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:19770428
