Title :
Calculations of Δv/v for thin-film s.a.w. transducers on a nonzero conductive silicon substrate
Author :
Venema, A. ; Humphryes, R.F. ; Dekkers, J.J.M.
Author_Institution :
Delft University of Technology, Laboratory for Electrical Materials, Department of Electrical Engineering, Delft, Netherlands
Abstract :
Theoretical results are presented for the piezoelectric coupling of a surface-acoustic-wave thin-film transducer on a silicon substrate having a nonzero electrical conductivity. It is shown that, for specific combinations of the material layer thicknesses, this conductivity disappears. Also, under certain conditions, the enhancement in the piezoelectric coupling is degraded.
Keywords :
acoustic surface wave devices; ultrasonic transducers; SAW transducer; Si substrate; nonzero electrical conductivity; piezoelectric coupling; surface acoustic wave thin film transducer;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:19770461
