A computer-aided design system for microelectromechanical systems (MEMCAD)

Author

Senturia, Stephen D. ; Harris, Robert M. ; Johnson, Brian P. ; Kim, Songmin ; Nabors, Keith ; Shulman, Matthew A. ; White, Jacob K.

Author_Institution

Dept. of Electr. Eng. & Comput. Sci., MIT, Cambridge, MA, USA

Volume

1

Issue

1

fYear

1992

fDate

3/1/1992 12:00:00 AM

Firstpage

3

Lastpage

13

Abstract

The authors describe the MIT microelectromechanical computer-aided design system (MEMCAD), in which selected commercial software packages are linked with specialized database and numerical programs to allow designers to quickly perform both mechanical and electrical analyses of structures either described directly, or derived from the design specification (mask data plus process flow). The system architecture, the various modules, and their present status are described, and present system performance is demonstrated with several examples

Keywords

CAD; computer aided analysis; mechanical engineering computing; micromechanical devices; MEMCAD; MIT; commercial software packages; computer-aided design system; database; design specification; electrical analyses; mechanical analysis; microelectromechanical computer-aided design; microelectromechanical systems; numerical programs; system performance; Computer industry; Design automation; Fabrication; Integrated circuit technology; Jacobian matrices; Laboratories; Microelectromechanical systems; Micromechanical devices; Power engineering computing; Process design;

fLanguage

English

Journal_Title

Microelectromechanical Systems, Journal of

Publisher

ieee

ISSN

1057-7157

Type

jour

DOI

10.1109/84.128049

Filename

128049